Top 10 Downloads by Technology
Updated 10 February 2010 Updated monthly, each list includes a cross-disciplinary sampling of the most frequently downloaded papers from SPIE Conference Proceedings and SPIE Journal papers. Each title is linked to the abstract page for that paper on the SPIE Digital Library.
Top 10 Overall Astronomy Biomedical Optics & Medical Imaging Defense & Security Electronic Imaging & Signal Processing Illumination & Displays Industrial Sensing & Measurement Lasers & Sources Micro/Nano Lithography Nanotechnology Optical Design & Engineering Optoelectronics & Communications Remote Sensing Solar & Alternative Energy Astronomy Biomedical Optics & Medical Imaging Electronic Imaging & Signal Processing Industrial Sensing & Measurement - Accurate models for EUV lithography (Proceedings of SPIE)
- Challenges for the 28nm half node: Is the optical shrink dead? (Proceedings of SPIE)
- Double-patterning requirements for optical lithography and prospects for optical extension without double patterning (J. Micro/Nanolithography, MEMS, and MOEMS)
- Estimating the out-of-band radiation flare levels for extreme ultraviolet lithography (J. Micro/Nanolithography, MEMS, and MOEMS)
- Experimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process (Proceedings of SPIE)
- Imaging budgets for extreme ultraviolet optics: ready for 22-nm node and beyond (J. Micro/Nanolithography, MEMS, and MOEMS)
- Intensive optimization of masks and sources for 22nm lithography (J. Micro/Nanolithography, MEMS, and MOEMS)
- On the uniqueness of optical images and solutions of inverse lithographical problems (Proceedings of SPIE)
- Orientation Zernike polynomials: a useful way to describe the polarization effects of optical imaging systems (J. Micro/Nanolithography, MEMS, and MOEMS)
- SMO photomask inspection in the lithographic plane (Proceedings of SPIE)
Optical Design & Engineering Optoelectronics & Communications Solar & Alternative Energy
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